Matotoru o te Papa Whakakotahi LN-on-Si 6 inihi-8 inihi 0.3-50 μm Si/SiC/Sapphire o ngā Rauemi

Whakaahuatanga Poto:

Ko te papa hiato LN-on-Si 6-inihi ki te 8-inihi he rauemi mahi-teitei e whakauru ana i ngā kiriata angiangi lithium niobate (LN) kotahi-kiriata me ngā papa silicon (Si), me ngā matotoru mai i te 0.3 μm ki te 50 μm. He mea hanga mō te hanga taputapu semiconductor me te optoelectronic matatau. Mā te whakamahi i ngā tikanga hononga matatau, tipu epitaxial rānei, ka whakarite tēnei papa i te kounga tioata teitei o te kiriata angiangi LN me te whakamahi i te rahi wafer nui (6-inihi ki te 8-inihi) o te papa silicon hei whakarei ake i te pai o te whakaputa me te whai hua o te utu.
Ki te whakatauritea ki ngā rauemi LN papatipu tuku iho, ka tukuna e te papa hiato LN-on-Si 6-inihi ki te 8-inihi te taurite wera me te pumau miihini, e pai ai mō te tukatuka taumata-wafer nui. Hei tāpiri, ka taea te whiriwhiri i ngā rauemi turanga rerekē pēnei i te SiC, te hapaira rānei hei whakatutuki i ngā whakaritenga tono motuhake, tae atu ki ngā taputapu RF auau-tiketike, ngā photonics whakauru, me ngā pūoko MEMS.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā tawhā hangarau

0.3-50μm LN/LT i runga i ngā Ārai
Paparanga o runga
Diameter	6-8 inihi
Te aronga	X, Z, Y-42 me ētahi atu.
Ngā Rauemi	LT, LN
Matotoru	0.3-50μm
Papa raro (Whakaritea)
Rauemi	Si, SiC, Hapaira, Spinel, Quartz

Ngā Āhuatanga Matua

He mea motuhake te papa hiato LN-on-Si 6-inihi ki te 8-inihi nā ōna āhuatanga rauemi ahurei me ngā tawhā ka taea te whakarerekē, e āhei ai te whakamahi whānuitia i roto i ngā ahumahi semiconductor me te optoelectronic:

1. Hototahitanga o te Wafer Nui: Mā te rahi o te wafer 6-inihi ki te 8-inihi ka taea te whakauru pai ki ngā raina hanga semiconductor o nāianei (hei tauira, ngā tukanga CMOS), ka whakaitihia ngā utu whakaputa me te āhei i te whakaputa papatipu.

2. Kounga Tioata Teitei: Mā ngā tikanga epitaxial, hononga rānei kua arotauhia ka iti te kiato hapa i roto i te kiriata angiangi LN, he mea tino pai mō ngā whakarerekētanga whatu mahi-teitei, ngā tātari ngaru oro mata (SAW), me ētahi atu taputapu tino tika.

3. Matotoru Ka Taea te Whakarite (0.3–50 μm): He pai ngā paparanga LN tino angiangi (<1 μm) mō ngā maramara photonic whakauru, ko ngā paparanga matotoru ake (10–50 μm) e tautoko ana i ngā taputapu RF mana-teitei, i ngā pūoko piezoelectric rānei.

4. Ngā Kōwhiringa Papatūāpapa Maha: Haunga te Si, ka taea te whiriwhiri i te SiC (te kawe wera nui) te hapaira rānei (te whakamarumaru nui) hei rauemi turanga hei whakatutuki i ngā tono o ngā tono auau-tiketike, pāmahana-tiketike, mana-tiketike rānei.

5. Te Pūmautanga o te Wera me te Āhuahanga: Ka tautokona e te papa silicon te āhanga ā-ringa, ka whakaitihia te piko, te ngatata rānei i te wā e tukatukahia ana, ā, ka whakapai ake i te hua o te taputapu.

Mā ēnei āhuatanga ka whakanohohia te papa hiato LN-on-Si 6-inihi ki te 8-inihi hei rauemi pai mō ngā hangarau hou pēnei i te whakawhitiwhiti kōrero 5G, LiDAR, me ngā whatu matūriki.

Ngā Taupānga Matua

Ko te papa hiato LN-on-Si 6-inihi ki te 8-inihi e whakamahia whānuitia ana i roto i ngā ahumahi hangarau teitei nā ōna āhuatanga hiko-whatu, piezoelectric, me te oro tino pai:

1. Ngā Whakawhitiwhiti Kōrero Whatu me ngā Hangarau Whakaahua Whakauru: Ka whakahohe i ngā whakarerekētanga hiko-whatu tere-teitei, ngā ara iahiko ngaru, me ngā ara iahiko whakauru whakaahua (PIC), e aro ana ki ngā hiahia whānui o ngā pokapū raraunga me ngā whatunga muka-whatu.

Ngā Pūrere RF 2.5G/6G: Nā te tauwehenga piezoelectric teitei o te LN he mea tino pai mō ngā tātari ngaru oro mata (SAW) me ngā tātari ngaru oro papatipu (BAW), e whakarei ake ana i te tukatuka tohu i roto i ngā teihana turanga 5G me ngā taputapu pūkoro.

3. MEMS me ngā Pūoko: Mā te pānga piezoelectric o te LN-on-Si ka taea te whakamahi i ngā whakaterenga tairongo-teitei, ngā pūoko koiora, me ngā transducers ultrasonic mō ngā tono hauora me ngā tono ahumahi.

4. Ngā Hangarau Kuantum: Hei rauemi whatu kore-raina, ka whakamahia ngā kiriata angiangi LN i roto i ngā pūtake mārama kuantum (hei tauira, ngā takirua photon e hono ana) me ngā maramara kuantum whakauru.

5. Ngā Reera me ngā Whatu Kore-Rārangi: Mā ngā paparanga LN tino angiangi ka taea te whakamahi i ngā taputapu whakaputa tuarua-haumāori (SHG) me ngā taputapu oscillation tawhā whatu (OPO) hei tukatuka reera me te tātaritanga matawai.

Mā te papa hiato LN-on-Si paerewa 6-inihi ki te 8-inihi ka taea te hanga i ēnei taputapu i roto i ngā papanga angiangi nui, ka tino whakaiti i ngā utu whakaputa.

Whakaritenga me ngā Ratonga

Ka whakaratohia e mātou he tautoko hangarau whānui me ngā ratonga whakaritenga mō te papa hiato LN-on-Si 6-inihi ki te 8-inihi hei whakatutuki i ngā hiahia R&D me te whakaputa kanorau:

1. Hanganga Ritenga: Ka taea te whakarite i te matotoru o te kiriata LN (0.3–50 μm), te whakatakotoranga tioata (X-cut/Y-cut), me te rauemi papa (Si/SiC/sapphire) kia pai ai te mahi a te taputapu.

2. Tukatuka Taumata-Wafer: He nui te tuku o ngā wafer 6-inihi me te 8-inihi, tae atu ki ngā ratonga o muri pēnei i te tapatapahi, te oro, me te paninga, me te whakarite kia rite ngā papa mō te whakauru taputapu.

3. Whakawhitiwhiti Kōrero me te Whakamātautau Hangarau: Te tautuhi i ngā āhuatanga o ngā rauemi (hei tauira, XRD, AFM), te whakamātautau mahi hiko-whatu, me te tautoko whakatauira taputapu hei tere ake i te whakamana hoahoa.

Ko tā mātou kaupapa matua he whakatū i te papa hiato LN-on-Si 6-inihi ki te 8-inihi hei otinga rauemi matua mō ngā tono optoelectronic me te semiconductor, e tuku ana i te tautoko pito-ki-pito mai i te R&D ki te hanga papatipu.

Whakamutunga

Ko te papa hiato LN-on-Si 6-inihi ki te 8-inihi, me tōna rahi wafer nui, te kounga rauemi pai, me te maha o ngā whakamahinga, kei te akiaki i ngā whanaketanga i roto i ngā whakawhitiwhitinga whatu, te 5G RF, me ngā hangarau kuantum. Ahakoa mō te hanga nui, mō ngā otinga ritenga rānei, ka tukuna e mātou he papa pono me ngā ratonga tautoko hei whakamana i te auahatanga hangarau.