6 inihi Silicon Carbide 4H-SiC Ingota Āhua-Whakamaroke, Wāhanga Tauira
Ngā Āhuatanga
1. Ngā Āhuatanga Ā-tinana me ngā Āhuatanga Hanganga
●Momo Rauemi: Hiraka Hiraka (SiC)
●Momo maha: 4H-SiC, hanganga karaihe hexagonal
●Diameter: 6 inihi (150 mm)
●Matotoru: Ka taea te whirihora (5-15 mm te tikanga mō te tauira rūpahu)
●Te whakatakotoranga o te karaihe:
oTuatahi: [0001] (papa-C)
oNgā kōwhiringa tuarua: 4° kei waho o te tuaka mō te tipu epitaxial kua arotauhia
●Te Aronga Papatahi Matua: (10-10) ± 5°
●Te whakatakotoranga papatahi tuarua: 90° te taha maui mai i te papatahi tuatahi ± 5°
2. Ngā Āhuatanga Hiko
●Te Ātete:
oHau-whakamaroke (>106^66 Ω·cm), he mea tino pai mō te whakaiti i te kaha pirinoa.
●Momo Whakaranu:
I tāpirihia ā-taurangi, ka hua ake he ātete hiko teitei me te pumau i raro i ngā āhuatanga whakahaere maha.
3. Ngā Āhuatanga Wera
●Te Arahi Wera: 3.5-4.9 W/cm·K, e āhei ai te tohatoha wera whai hua i roto i ngā pūnaha mana-tiketike.
●Taurangi Whānui Wera: 4.2×10−64.2 \times 10^{-6}4.2×10−6/K, e whakarite ana i te pumau o ngā āhuatanga i te wā e tukatukahia ana i te pāmahana teitei.
4. Ngā Āhuatanga Whatu
●Āputa here: He whānui te āputa here o te 3.26 eV, e āhei ai te mahi i raro i ngā ngaohiko me ngā pāmahana teitei.
●Mārama: He mārama teitei ki ngā roangaru UV me ngā roangaru e kitea ana, he mea whai hua mō ngā whakamātautau optoelectronic.
5. Ngā Āhuatanga Mīhini
●Pakeke: Ko te tauine Mohs 9, tuarua ki te taimana, e whakapūmau ana i te pakari i te wā e tukatukahia ana.
●Kōkī o te Hapa:
oI whakahaeretia mō te iti rawa o ngā hapa nui, kia tika ai te kounga mō ngā tono tauira rūpahu.
●Papatahi: Te ōritetanga me ngā pekapeka
| Tawhā | Ngā Taipitopito | Wāhanga |
| Tau | Tauira Tauira | |
| Diameter | 150.0 ± 0.5 | mm |
| Te Aronga o te Wafer | I runga i te tuaka: <0001> ± 0.5° | tohu |
| Ātete Hiko | > 1E5 | Ω·cm |
| Te whakatakotoranga papatahi tuatahi | {10-10} ± 5.0° | tohu |
| Roa Papatahi Tuatahi | Te kokoru | |
| Ngā Kapiti (Tirohanga Mārama Kaha-Teitei) | < 3 mm te whānui | mm |
| Pereti Hex (Tirohanga Mārama Kaha-Teitei) | Te horahanga tāpiri ≤ 5% | % |
| Ngā Rohe Momo-maha (Tirohanga Mārama Kaha-Tiketike) | Te horahanga tāpiri ≤ 10% | % |
| Te Kīanga o te Paipa Maikoro | < 50 | cm−2^-2−2 |
| Tapahi Tapa | 3 e whakaaetia ana, ia ≤ 3 mm | mm |
| Tuhipoka | Ko te matotoru o te papa tapahi < 1 mm, > 70% (haunga ngā pito e rua) e tutuki ana i ngā whakaritenga o runga ake nei |
Ngā tono
1. Te Hanga Tauira me te Rangahau
He rauemi tino pai te ingota tauira 6-inihi 4H-SiC tauira rūpahu mō te hanga tauira me te rangahau, e āhei ai ngā kaihanga me ngā taiwhanga ki te:
●Ngā tawhā tukanga whakamātautau i roto i te Whakatakotoranga Kohu Matū (CVD) me te Whakatakotoranga Kohu Tinana (PVD).
●Te whakawhanake me te whakapai ake i ngā tikanga whakairo, whakakanapa, me te tapahi i ngā mea whakarewa.
●Tūhurahia ngā hoahoa taputapu hou i mua i te neke ki ngā rauemi kounga-whakaputa.
2. Te Whakatikatika me te Whakamātautau i te Pūrere
Nā ngā āhuatanga ārai-haurua ka tino whai hua tēnei ingota mō:
●Te aromatawai me te whakatikatika i ngā āhuatanga hiko o ngā taputapu mana-tiketike me ngā taputapu auau-tiketike.
●Te whakatauira i ngā āhuatanga whakahaere mō ngā MOSFET, ngā IGBT, ngā diode rānei i roto i ngā taiao whakamātautau.
●Hei whakakapinga utu-pai mō ngā papa parakore-teitei i te wā o te whanaketanga tōmua.
3. Ngā Hikohiko Mana
Mā te kawe wera teitei me ngā āhuatanga whānui o te āputa o te 4H-SiC ka taea te whakahaere pai i roto i ngā hikohiko mana, tae atu ki:
●Ngā pūhiko hiko ngaohiko teitei.
●Ngā pūwhakawhiti hiko waka (EV).
●Ngā pūnaha pūngao hou, pērā i ngā pūwhakahuri hiko o te rā me ngā tāpine hau.
4. Ngā Whakamahinga Auautanga Reo Irirangi (RF)
Nā te iti o ngā mate hiko-ā-ira me te nui o te nekehanga irahiko o te 4H-SiC, he mea pai mō:
●Ngā whakakaha RF me ngā transistors i roto i ngā hanganga whakawhitiwhiti kōrero.
●Ngā pūnaha radar auau-teitei mō ngā tono rererangi me te tiaki whenua.
●Ngā wāhanga whatunga ahokore mō ngā hangarau 5G hou.
5. Ngā Pūrere Ātete-Irahiko
Nā tōna ātete ā-roto ki ngā hapa i puta mai i te hihi, he mea tino pai te 4H-SiC haurua-whakamaroke mō:
●Ngā taputapu tūhuratanga ātea, tae atu ki ngā hikohiko amiorangi me ngā pūnaha hiko.
●Ngā hikohiko whakapakeketia e te irahiko mō te aroturuki me te whakahaere karihi.
●Ngā tono parepare e hiahia ana kia pakari i roto i ngā taiao tino kino.
6. Ngā Optoelectronics
Mā te māramatanga whatu me te whānui o te āputa o te 4H-SiC ka taea te whakamahi i roto i:
●Ngā pūoko whakaahua UV me ngā rama LED kaha-tiketike.
●Te whakamātautau i ngā paninga whatu me ngā maimoatanga mata.
●Te hanga tauira o ngā wāhanga whatu mō ngā pūoko matatau.
Ngā Painga o ngā Rauemi Tauira
Te Whai Hua o te Utu:
He iti ake te utu o te tauira rūpahu hei whakakapi i ngā rauemi rangahau, i ngā rauemi whakaputa rānei, ā, he mea tino pai mō ngā whakamātautau noa me te whakamahine i ngā tukanga.
Te āheinga ki te whakarite:
Mā ngā ine whirihora me ngā whakatakotoranga tioata ka taea te whakarite kia hototahi ki te whānuitanga o ngā tono.
Te Tauine:
E hangai ana te whānui 6-inihi ki ngā paerewa ahumahi, e āhei ai te tauine ngāwari ki ngā tukanga taumata whakaputa.
Pakari:
Nā te kaha ā-mīhini me te pumau o te wera, ka roa te mau me te pono o te ingot i raro i ngā āhuatanga whakamātautau rerekē.
Ngā mahi maha:
He pai mō ngā ahumahi maha, mai i ngā pūnaha pūngao ki ngā whakawhitiwhiti kōrero me ngā hikohiko opto.
Whakamutunga
Ko te ingota whakamātao-haurua 6-inihi Silicon Carbide (4H-SiC), he tauira tauira, he tūāpapa pono, he maha hoki ngā whakamahinga mō te rangahau, te hanga tauira, me te whakamātautau i roto i ngā rāngai hangarau hou. Nā ōna āhuatanga wera, hiko, me te miihini tino pai, me te utu whaitake me te āheinga ki te whakarite, he mea nui tēnei rauemi mō te ao mātauranga me te ahumahi. Mai i ngā hikohiko mana ki ngā pūnaha RF me ngā taputapu whakapakeke-ira, ka tautokohia e tēnei ingota te auahatanga i ia wāhanga o te whanaketanga.
Mō ētahi atu taipitopito, mō te tono utu rānei, whakapā mai ki a mātou. Kei te rite tā mātou tīma hangarau ki te āwhina i a koe me ngā otinga kua whakaritea kia tutuki ai ō hiahia.
Kauwhata Taipitopito
