4inihi SiC Epi wafer mo MOS SBD ranei

4inihi SiC Epi angiangi mo te MOS, SBD ranei te Whakaahua Whakaatu

Whakaahuatanga Poto:

Kei a SiCC te SiC (Silicon Carbide) raina hanga angiangi angiangi, te whakauru i te tipu karaihe, te tukatuka angiangi, te hanga angiangi, te whakakoi, te horoi me te whakamatautau. I tenei wa, ka taea e matou te whakarato axial or off-axis semi-insulating and semi-conductive 4H me 6H SiC wafers me te rahi o te 5x5mm2, 10x10mm2, 2″, 3″, 4″ me te 6″, ka pakaru i roto i te pehanga hapa, te tukatuka purapura karaihe me te tipu tere me etahi atu Kua pakaru i roto i nga hangarau matua penei i te whakakore i nga hapa, te tukatuka purapura karaihe me te tipu tere, me te whakatairanga i te rangahau taketake me te whakawhanaketanga o te silicon carbide epitaxy, nga taputapu me etahi atu rangahau taketake e pa ana.

Tukuna he imeera ki a matou

Taipitopito Hua

Tohu Hua

Ko te Epitaxy e pa ana ki te tipu o te paparanga o te papanga karaihe kotahi te kounga teitei ake i runga i te mata o te taputapu carbide silicon. I roto ia ratou, ko te tipu o te paparanga epitaxial gallium nitride i runga i te tïpako carbide silicon insulating ka kiia he epitaxy heterogeneous; ko te tipu o te paparanga epitaxial silicon carbide i runga i te mata o te tïpako carbide silicon conductive ka kiia ko te epitaxy homogeneous.

Ko te Epitaxial i runga i nga whakaritenga hoahoa taputapu mo te tipu o te paparanga mahi matua, ko te nuinga o te waa e whakatau ana i te mahi o te maramara me te taputapu, te utu o te 23%. Ko nga tikanga matua o te epitaxy kiriata angiangi SiC i tenei waahanga ko: te whakangao kohu matū (CVD), te epitaxy kurupae ngota (MBE), te epitaxy wahanga wai (LPE), me te whakahekenga laser me te whakaheke (PLD).

Ko te Epitaxy he hononga tino nui ki te umanga katoa. Ma te whakatipu i nga paparanga epitaxial GaN i runga i nga taputapu carbide silicon insulating, ka hangaia nga wafers epitaxial epitaxial i runga i te carbide silicon, ka taea ano te hanga ki nga taputapu GaN RF penei i nga transistors nekeneke hiko teitei (HEMTs);

Na roto i te whakatipu i te paparanga epitaxial silicon carbide i runga i te tïpako conductive ki te tiki angiangi epitaxial silicon carbide epitaxial, a i roto i te paparanga epitaxial i runga i te hanga o Schottky diodes, koura-hauora haurua-para transistors pānga, transistors bipolar kuaha kiriweti me etahi atu taputapu mana, na te kounga o te epitaxial i runga i te mahi o te taputapu he tino nui te paanga ki te whakawhanaketanga o te umanga kei te whai waahi nui ano hoki.