4 inihi SiC Wafers 6H Semi-Insulating SiC Substrates prime, rangahau, me te reke

4 inihi SiC Wafers 6H Semi-Insulating SiC Substrates matua, rangahau, me te karaehe ahua ahua

Whakaahuatanga Poto:

Ko te taputapu carbide silicon semi-insulated e hangaia ana ma te tapahi, te huri, te whakakoi, te horoi me etahi atu hangarau tukatuka i muri i te tipu o te karaihe kirikiri carbide. Ka whakatipuhia he paparanga karaihe maha ranei i runga i te tïpako e tutuki ana i nga whakaritenga o te kounga hei epitaxy, katahi ka mahia te taputapu RF ngaruiti ma te whakakotahi i te hoahoa ara iahiko me te kapi. Wātea rite 2inihi 3inihi 4inihi 6inihi 8 inihi ahumahi, rangahau me te kōeke whakamātautau āhua-waitara silicon carbide substrates karaihe kotahi.

Tukuna he imeera ki a matou

Taipitopito Hua

Tohu Hua

Whakatakotoranga Hua

Kōeke			Kore MPD Koeke Whakaputa (Keke Z)			Koeke Whakaputa Paerewa(Keke P)		Kōeke Dummy (Kōeke D)
Diamita			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Takotoranga Wafer			Tuaka Weto : 4.0° ki< 1120 > ±0.5° mo te 4H-N, I te tuaka : <0001>±0.5° mo te 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Kaupapa Papatahi Tuatahi		{10-10} ±5.0°
Te Roa Papatahi Tuatahi		32.5 mm±2.0 mm
Te Roa Papatahi Tuarua		18.0 mm±2.0 mm
Takotoranga Papatahi Tuarua		Silicon kanohi ki runga: 90° CW. mai i Prime flat ±5.0°
Whakakorenga Tapa		3 mm
LTV/TTV/Kopere/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Te taratara			C kanohi				Porohia		Ra≤1 nm
			Ko te kanohi	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Nga Kapiti Tapa Na Te Maama Nui		Karekau						Te roa whakaemi ≤ 10 mm, kotahi roa≤2 mm
Nga Pereti Hex Na Te Maama Nui		Horahanga whakahiato ≤0.05%						Horahanga whakahiato ≤0.1%
Nga Waahanga Polytype Ma te Maama Maama Nui		Karekau						Horahanga whakahiato≤3%
Nga Whakauru Wao Ataata		Horahanga whakahiato ≤0.05%						Horahanga whakahiato ≤3%
Nga Rakuraku o te Mata Silicon Na Te Maama Nui		Karekau						Roa whakahiato≤1＊diamita angiangi
Ko nga maramara Tapa Teitei Ma te Maama Kaha		Kore e whakaaetia ≥0.2 mm te whanui me te hohonu						5 whakaaetia, ≤1 mm ia
Ko te Whakakinotanga o te Mata Silicon Na te Kaha Teitei		Karekau
Te takai		Ripene Angiangi-maha, Ipu Angiangi Kotahi ranei