Ngā Wafer SiC 4 inihi 6H Ngā Papa SiC Āhua-Whakamaroke, te kounga tuatahi, te rangahau, me te tauira rūpahu

Ngā Wafer SiC 4 inihi 6H Ngā Papa SiC Āhua-Whakamātao, te kounga tuatahi, te rangahau, me te tauira tauira Whakaahua Matua

Whakaahuatanga Poto:

Ka hangaia te paparanga karawiti silicon carbide haurua-whakamarumaru mā te tapahi, te huri, te whakakanapa, te horoi me ētahi atu hangarau tukatuka i muri i te tipu o te tioata karawiti silicon carbide haurua-whakamarumaru. Ka tipuhia he paparanga tioata maha-paparanga, he paparanga rānei ki runga i te paparanga e tutuki ana i ngā whakaritenga kounga hei epitaxy, kātahi ka hangaia te taputapu RF ngaruiti mā te whakakotahi i te hoahoa ara iahiko me te takai. Kei te wātea hei paparanga karaihe kotahi ahumahi, rangahau me te whakamātautau haurua-whakamarumaru 2inihi 3inihi 4inihi 6inihi 8 inihi.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Whakatakotoranga Hua

Tau			Kore Tohu Whakaputa MPD (Tohu Z)			Paerewa Whakaputa Paerewa (P Grade)		Taumata Rūpahu (Taumata D)
Diameter			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Te Aronga o te Wafer			Tuaka ki waho: 4.0° ki te taha < 1120 > ±0.5° mō te 4H-N, Kei runga i te tuaka: <0001>±0.5° mō te 4H-SI
	4H-SI		≤1cm^-2			≤5 henimita^-2		≤15 henimita^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Te whakatakotoranga papatahi tuatahi		{10-10} ±5.0°
Roa Papatahi Tuatahi		32.5 mm±2.0 mm
Roa Papatahi Tuarua		18.0 mm±2.0 mm
Te whakatakotoranga papatahi tuarua		Ko te mata o te silicon ki runga: 90° CW. mai i te papatahi Matua ±5.0°
Te Whakakore i te Tapa		3 mm
LTV/TTV/Pīkau/Whā		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Te taratara			Mata C				Pōrana		Ra≤1 nm
			Mata Si	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Ngā Kapiti o te Tapa i te Mārama Kaha Rawa		Kāore						Te roa tāpiri ≤ 10 mm, takitahi roa≤2 mm
Pereti Hex mā te Mārama Kaha Teitei		Te horahanga tāpiri ≤0.05%						Te horahanga tāpiri ≤0.1%
Ngā Rohe Momo-maha Mā te Mārama Kaha Teitei		Kāore						Te horahanga tāpiri ≤3%
Ngā Whakaurunga Waro Tirohanga		Te horahanga tāpiri ≤0.05%						Te horahanga tāpiri ≤3%
Ngā Karawarawa Mata Silicon e te Mārama Kaha Teitei		Kāore						Te roa tāpiri ≤1＊te whānui o te angaanga
Ngā Maramara Tapa Teitei Mā te Mārama Kaha		Kāore i whakaaetia te whānui me te hohonu ≥0.2 mm						5 e whakaaetia ana, ≤1 mm ia
Te Parahanga o te Mata Silicon mā te Kaha Nui		Kāore
Tākai		Rīpene Wafer Maha-wafer, Ipu Wafer Takitahi rānei