2inihi SiC ingot Dia50.8mmx10mmt 4H-N monocrystal
SiC Crystal Growth Hangarau
Ko nga ahuatanga o te SiC he uaua ki te whakatipu tioata kotahi.Ko te nuinga o tenei na te mea kaore he waahanga wai me te ōwehenga stoichiometric o Si: C = 1: 1 i te pehanga hau, a kaore e taea te tipu SiC ma nga tikanga tipu pakeke ake, penei i te tikanga tuhi tika me te ko te tikanga takahanga whakaraerae, ko nga mea matua o te umanga semiconductor.Ko te tikanga, ko te otinga me te ōwehenga stoichiometric o Si : C = 1 : 1 ka taea anake te tiki ina nui ake te pehanga i te 10E5atm me te teitei ake o te pāmahana i te 3200 ℃.I tenei wa, ko nga tikanga auraki ko te tikanga PVT, ko te tikanga wai-waahanga, me te tikanga whakangao matū-waa-mahana teitei.
Ko nga angiangi SiC me nga tioata e whakaratohia ana e matou he mea whakatipu ma te kawe kohu tinana (PVT), a ko nga korero e whai ake nei he korero poto mo te PVT:
Ko te tikanga kawe kohu tinana (PVT) i ahu mai i te tikanga whakaheke hau-waahanga i hangaia e Lely i te tau 1955, ka tuuhia te paura SiC ki roto i te ngongo kauwhata, ka whakamahana ki te wera nui kia pirau ai te paura SiC, ka whakaheke, katahi ko te kauwhata. ka whakamataohia te ngongo, a, ko nga wahanga hau-waahanga o te paura SiC ka whakaputuhia, ka whakakoataatahia ano he kiripiri SiC ki te takiwa o te ngongo kauwhata.Ahakoa he uaua tenei tikanga ki te whiwhi kiripiri kotahi SiC nui-rahi, a, he uaua ki te whakahaere i te tukanga waipara i roto i te ngongo kauwhata, ka whai whakaaro mo nga kairangahau o muri mai.
YM Tairov et al.i roto i Russia whakaurua te ariā o te karaihe purapura i runga i tenei kaupapa, i whakaoti i te raruraru o te ahua karaihe kore mana me te tūnga nucleation o tioata SiC.I haere tonu nga kairangahau o muri mai ki te whakapai ake, a, i te mutunga ka whakawhanakehia te tikanga whakawhiti kohu tinana (PVT) e whakamahia ana i nga mahi ahumahi i enei ra.
I te mea ko te tikanga whakatipu kiripiri SiC tuatahi, ko te PVT te tikanga whakatipu tino auraki mo nga tioata SiC.Ka whakatauritea ki etahi atu tikanga, he iti noa nga whakaritenga o tenei tikanga mo nga taputapu tipu, he ngawari te tipu o te tipu, he kaha te whakahaere, he tino whakawhanaketanga me te rangahau, kua oti te mahi ahumahi.
Hoahoa Taipitopito
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