200mm 8inihi GaN i runga i te papa angiangi hapaira Epi-apa
Whakataki hua
Ko te paparanga GaN-on-Sapphire 8-inihi he rauemi haurua-whakakotahi kounga teitei i hangaia mai i te paparanga Gallium Nitride (GaN) i whakatipuria ki runga i te paparanga Sapphire. He tino pai ngā āhuatanga kawe hiko o tēnei rauemi, ā, he mea tino pai mō te hanga i ngā taputapu haurua-whakakotahi mana-teitei me te auau-teitei.
Tikanga Hanga
Ko te tukanga hanga ko te tipu epitaxial o te paparanga GaN i runga i te papa Sapphire mā te whakamahi i ngā tikanga matatau pēnei i te metal-organic chemical vapor deposition (MOCVD) te molecular beam epitaxy rānei (MBE). Ka mahia te whakatakotoranga i raro i ngā tikanga whakahaere kia pai ai te kounga tioata me te ōritetanga o te kiriata.
Ngā tono
He whānuitia ngā whakamahinga o te papa GaN-on-Sapphire 8-inihi i roto i ngā mara maha tae atu ki ngā whakawhitiwhiti kōrero ngaruiti, ngā pūnaha radar, te hangarau ahokore, me ngā optoelectronics. Ko ētahi o ngā whakamahinga noa ko:
1. Ngā whakakaha hiko RF
2. Te umanga rama LED
3. Ngā taputapu whakawhitiwhiti whatunga ahokore
4. Ngā taputapu hiko mō ngā taiao pāmahana teitei
5. Ongā taputapu hiko-poto
Ngā Whakatakotoranga Hua
-Ahu: Ko te whānui o te papa he 8 inihi (200 mm).
- Kounga Mata: Ka orohia te mata kia tino maeneene, ā, he tino pai te kounga rite ki te whakaata.
- Matotoru: Ka taea te whakarite i te matotoru o te paparanga GaN i runga i ngā whakaritenga motuhake.
- Tākai: Kua ata takaihia te papa ki ngā rauemi ārai-pūmau hei ārai i te kino i te wā e kawe ana.
- Papatahi Ūpoko: He papatahi motuhake te Ūpoko hei āwhina i te whakahāngai me te whakahaere i te anga i te wā e hangaia ana te taputapu.
- Ētahi atu tawhā: Ka taea te whakarite i ngā āhuatanga motuhake o te matotoru, te ātete, me te kukū o te ira tāpiri kia rite ki ngā hiahia o te kiritaki.
Nā ōna āhuatanga rauemi papai me ōna whakamahinga maha, he kōwhiringa pono te papa GaN-on-Sapphire 8-inihi mō te whakawhanaketanga o ngā taputapu haurua-whakaoti teitei i roto i ngā momo ahumahi.
Haunga te GaN-On-Sapphire, ka taea hoki e mātou te tuku atu i roto i te mara o ngā tono taputapu hiko, kei roto i te whānau hua ngā anga epitaxial AlGaN/GaN-on-Si 8-inihi me ngā anga epitaxial AlGaN/GaN-on-Si P-cap 8-inihi. I taua wā anō, i auaha mātou i te tono o tā mātou ake hangarau epitaxy GaN 8-inihi matatau i roto i te mara ngaruiti, ā, i whakawhanake i tētahi anga epitaxy AlGaN/GAN-on-HR Si 8-inihi e whakakotahi ana i te mahi teitei me te rahi nui, te utu iti me te hototahi ki te tukatuka taputapu paerewa 8-inihi. Haunga te gallium nitride e hangai ana ki te silicon, kei a mātou anō he raina hua o ngā anga epitaxial AlGaN/GaN-on-SiC hei whakatutuki i ngā hiahia o ngā kiritaki mō ngā rauemi epitaxial gallium nitride e hangai ana ki te silicon.
Kauwhata Taipitopito




