156mm 159mm 6 inihi te anga whakarewa hapaira mō te kawe C-Plane DSP TTV
Whakatakotoranga
| Taonga | Ngā Waferi Hapira C-plane (0001) 6-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 100.0 mm +/- 0.1 mm | |
| Matotoru | 650 µm +/- 25 µm | |
| Te whakatakotoranga papatahi tuatahi | Papa-C (00-01) +/- 0.2° | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 20 µm | |
| PĪKO | < 20 µm | |
| WHAWHĀ | < 20 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| 25 ngā wahi i roto i te takai rīpene kotahi, i te takai kotahi rānei. | ||
E whakamahia ana te tikanga Kylopoulos (tikanga KY) e te maha o ngā kamupene i Haina hei whakaputa tioata hapaira mō te whakamahi i roto i ngā ahumahi hikohiko me te whatu.
I roto i tēnei tukanga, ka rewahia te waikura konumohe parakore-teitei i roto i tētahi oko whakarewa i ngā pāmahana neke atu i te 2100 nekehanga Celsius. Ko te tikanga, he mea hanga te oko whakarewa ki te tungsten, ki te molybdenum rānei. Ka rumakina he tioata purapura kua whakaritea tika ki roto i te alumina rewa. Ka tōia mārire te tioata purapura ki runga, ā, ka taea te huri i te wā kotahi. Mā te whakahaere tika i te pikinga pāmahana, te tere kume me te tere whakamatao, ka taea te whakaputa i tētahi porotaka nui, kotahi te tioata, tata ki te porotaka mai i te rewa.
I muri i te whakatipu i ngā poro hapaira karaihe kotahi, ka pokaia kia hanga hei tokotoko porotaka, kātahi ka tapahia kia rite ki te matotoru o te matapihi e hiahiatia ana, ā, i te mutunga ka orohia kia rite ki te āhua o te mata e hiahiatia ana.
Kauwhata Taipitopito
